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• {Chemicalbook} 无机化工产品: 无机盐: Cv电子工业用无机化工产品
• {SA} Chemical Synthesis, Electronic Chemicals, Gases, Materials Science, Micro/NanoElectronics, Specialty Gases, Synthetic Reagents
• {uni_hamburg} no charge; 1fragment
• Chemical Synthesis, Electronic Chemicals, Gases, Materials Science, Micro/NanoElectronics, Specialty Gases, Synthetic Reagents

相关文献及参考

• Corp MSDS 1 (1), 1166:D / RegBook 1 (3), 3323:H
• Short: II/24B Title: Molecular Constants mostly from Microwave, Molecular Beam, and Sub-Doppler Laser Spectroscopy: Rotational, Centrifugal Distortion and Related Constants of Diamagnetic Asymmetric Top Molecules Author: Demaison, J.; Vogt, J.; Wlodarczak, G. Editor: Hüttner, W. Source: Landolt-Börnstein, New Series Volume: II/24B Year: 2000 Keyword: Diamagnetics Diatomics; Linear Symmetric Rotors; Molecular Constants; Molecules ISBN: 3-540-65345-7 ISBN: 978-3-540-65345-5 Internet Resource: DOI:10.1007/b58835 RefComment: VIII, 525 pages. Hardcover Abstract: Volume II/24 presents the spectroscopic data on diamagnetic and paramagnetic molecules as well as on molecular ions and radicals up to date considering the publications up to and partly including 1997. The spectroscopic information collected in this volume has been obtained principally from gas phase microwave measurements. Volume II/24 is a supplement to volumes II/4, II/6, II/14, and II/19 and is planned to appear in five subvolumes, the last of which will contain the substance index taking into account all molecules worked at since 1967 in the volumes mentioned and will provide cross references to and between all tables of these. The present subvolume II/24B contains an introduction and tables of rotational and centrifugal distortion constants of asymmetric-top molecules, i.e. data which roughly specifies the frequencies of the rotational transitions of these types of rotors.
• Short: II/24C Title: Molecular Constants mostly from Microwave, Molecular Beam, and Sub-Doppler Laser Spectroscopy: Dipole Moments, Quadrupole Coupling Constants, Hindered Rotation and Magnetic Interaction Constants of Diamagnetic Molecules Author: Demaison, J.; Hübner, H.; Hüttner, W.; Vogt, J.; Wlodarczak, G. Editor: Hüttner, W. Source: Landolt-Börnstein, New Series Volume: II/24C Year: 2002 Keyword: Atoms; Molecules and Cluster; Physi

安全信息

GHS Symbol

TYPE OF TEST            : LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE       : Inhalation
SPECIES OBSERVED        : Rodent - mouse
DOSE/DURATION           : 144 ppm/4H
TOXIC EFFECTS :
   Details of toxic effects not reported other than lethal dose value
REFERENCE :
   ARTODN Archives of Toxicology.  (Springer-Verlag, Heidelberger Pl. 3, D-1000
   Berlin 33, Fed. Rep. Ger.)  V.32-    1974-  Volume(issue)/page/year:
   70,218,1996

TYPE OF TEST            : LC50 - Lethal concentration, 50 percent kill
ROUTE OF EXPOSURE       : Inhalation
SPECIES OBSERVED        : Rodent - rat
DOSE/DURATION           : 215 ppm
TOXIC EFFECTS :
   Sense Organs and Special Senses (Eye) - lacrimation
   Lungs, Thorax, or Respiration - acute pulmonary edema
   Lungs, Thorax, or Respiration - dyspnea
REFERENCE :
   JTSCDR Journal of Toxicological Sciences.  (Japanese Soc. of Toxicological
   Sciences, 4th Floor, Gakkai Center Bldg., 4-16, Yayoi 2-chome, Bunkyo-ku,
   Tokyo 113, Japan)  V.1-    1976-  Volume(issue)/page/year: 18,394,1993

其他信息

• 蒸气密度:3.5 (vs air)
• MOL 文件:4109-96-0.mol
• MSDS 信息:二氯硅烷(4109-96-0).msds
• 毒性:吸入人体会水解生成盐酸、刺激呼吸系统，引起咳嗽，肺部水肿。吸人二氯二氢硅气体时间较长会引起窒息而死。溅在皮肤上可引起坏死，溃疡长期不愈。 生产人员要穿着密闭型工作服，戴防毒口罩、密闭眼镜、乳胶手套等劳保用品，防止呼吸器官、眼睛和皮肤的直接接触。生产设备要密闭，车间要通风良好。下班后要洗淋浴。
• 上游原料:硅 --> 三氯硅烷 --> 高纯 --> 电子 --> 二氯二氢硅
• 方法一:将硅粉和氯化氢按适当比例进行反应，生成二氯二氢硅，经蒸馏分离三氯氢硅，把得到的二氯二氢硅进行精制，制得电子级高纯二氯二氢硅成品。其 Si+2HCl→SiH2C12
• 用途二:用于半导体制造中，尤其是外延法工艺作为硅源。
• 蒸气压:1254 mm Hg ( 20 °C)
• Sigma Aldrich:4109-96-0(sigmaaldrich)
• F:4.5
• 参考质量标准:参考标准 指标名称 指标 电子级 硼(B)/(mg/kg) ＜0.3 磷(P)/(mg/kg)＜ 0.3 四氯化硅(SiCl4)/%＜ 0.1 三氯氢硅(SiHC13)/%＜ 0.2
• 外观性质:无色气体。
• 用途一:用于电子工业中多晶硅外延生长以及化学气相淀积二氧化硅和氮化硅
• TSCA:Yes